Semiconductors and Electronics
The semiconductor industry is a crucial sector of the global economy, driving advancements in technology and innovation. It focuses on the design, manufacture, and distribution of semiconductor devices, which are essential components in a wide range of electronic systems. This industry is integral to creating the microchips and integrated circuits that power a vast array of devices, from smartphones and computers to automotive systems and household appliances.
In the semiconductor industry, precise control of the manufacturing environment is crucial to producing high-quality components. One key aspect of this control is the use of advanced vacuum technologies. Vacuum systems are integral to various semiconductor fabrication processes, ensuring a clean and controlled environment for the production of microchips and other electronic components.
Vacuum pumps and systems are utilized in various applications within the semiconductor industry including:
Thin-Film Deposition: Vacuum technologies are vital for thin-film deposition processes, including CVD (Chemical Vapor Deposition) and PVD (Physical Vapor Deposition). These processes require controlled vacuum environments to ensure uniform film thickness and material purity. Rotary vane, dry screw pumps, and vacuum boosters are commonly used to maintain the necessary vacuum levels for successful thin-film deposition.
Etching: Etching is used to transfer the patterns of photomasks onto a semiconductor wafer. It enables the creation of fine features and complex patterns required for modern semiconductor devices, such as transistors, capacitors, and interconnects. In semiconductor etching, precise control of the vacuum environment ensures the accurate patterning of semiconductor materials.
Wafer Handling and Inspection: Rotary piston and dry screw pumps are utilized in systems designed for the clean and efficient handling of semiconductor wafers. They help maintain a controlled atmosphere, reducing the risk of contamination and ensuring the integrity of the wafer surface during transfer between different parts of the manufacturing process.
Crystal Growing: The quality and characteristics of semiconductor devices are directly influenced by the properties of the crystal from which they are made. Most semiconductors, particularly those used in integrated circuits, are made from silicon, which is commonly grown as a single crystal. Single crystal silicon provides a uniform and defect-free substrate necessary for producing high-performance semiconductor devices.
Learn how Kinney’s vacuum boosters, dry screw, and rotary piston vacuum pumps are used in these processes.
Vacuum Sealing: In the final stages of semiconductor manufacturing, vacuum technologies are used for packaging and sealing semiconductor devices. This helps protect the delicate components from moisture, contaminants, and mechanical damage.
Vacuum technologies are indispensable in the semiconductor industry, enabling critical processes such as deposition, etching, lithography, and packaging. They provide the controlled environments necessary to ensure high-quality, reliable semiconductor devices. By maintaining precise vacuum conditions, these technologies contribute to the advancement of semiconductor manufacturing and the continuous development of cutting-edge electronic components.
Rotary Piston Vacuum Pumps
Single stage and two stage rotary piston pumps, with options of air-cooled or water-cooled designs.
Dry Screw Vacuum Pumps
Dry screw vacuum pumps are an increasingly popular dry vacuum technology used throughout chemical and pharmaceutical processing. 71-459 ACFM, 0.01 Torr (0.013 mbar)
Vacuum Boosters
Kinney Vacuum Boosters are a flexible upgrade for all types of vacuum pumps. A vacuum booster "supercharges" your existing vacuum system.
Engineered Vacuum Solutions
Our team of engineers can design a custom vacuum system solution up to 12,000 CFM. Call or complete our RFQ form for assistance.